6SL3352-1AG37-4FA1

光電式編碼器比磁電式編碼器出現(xiàn)的時(shí)間早很多，雖然現(xiàn)在市面上大多聽到的都是磁電式編碼器這個(gè)后起之秀更新迭代的信息，但是高工藝水平下的光電式編碼器可以實(shí)現(xiàn)更的測(cè)量。

提高光電編碼器的精度和分辨率簡(jiǎn)單的辦法就是增加碼道的數(shù)量，一是加大碼盤尺寸，二是縮小碼道寬度，加大碼盤在現(xiàn)今小型化趨勢(shì)下顯然不可取，縮小碼道寬度又會(huì)讓工藝難度直線上升。

目前有一種通孔加工技術(shù)使用MEMS工藝，在PD芯片上形成通孔，將特種LED置于其中，實(shí)現(xiàn)LED與PD芯片級(jí)的合二為一。通過調(diào)節(jié)PD芯片的厚度，能使LED的高度與PD感光區(qū)域的高度保持一致，提高分辨率。

柵刻劃制作技術(shù)也是一項(xiàng)光電編碼器廠商核心實(shí)力的體現(xiàn)，國(guó)內(nèi)禹衡的柵刻劃制作技術(shù)在線條均勻性、線條準(zhǔn)直性、光柵精度在中端市場(chǎng)受到廣泛認(rèn)可，目前位數(shù)高已經(jīng)可以做到29 bit。

不少?gòu)S商開始通過實(shí)現(xiàn)PD與外圍電路的一體化設(shè)計(jì)、設(shè)計(jì)特殊的降低噪聲的電路結(jié)構(gòu)等方式，讓器件更加易于使用，并發(fā)揮出的性能，或者改進(jìn)芯片晶體結(jié)構(gòu)，實(shí)現(xiàn)電流限制型LED更高的可靠性，核心工藝的革新持續(xù)升級(jí)著光電編碼器的性能。

MECS UTC350R handler robot W/ UTC100A controller

MECS UTC800P robot arm and controller

MECS UTC-800 wafer handler robot 

MECS UTC-350R wafer handler robot UTC350R

MECS CYBEQ UTC100 UTC-100 Robot Controller Refurb Spare

MECS UTC-100A controller for UTC350R robot UTC100 

MECS UTC-100A controller for UTC-800 robot W/ SB100 

MECS UTC-100A controller for UTC350R robot UTC100

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